Products
STA-10
for high-volume manufacturing of electronic components
The STA-10iL automated plasma system is designed to clean and activate substrates for improved adhesion. It is the ideal plasma system for electronics manufacturing and semiconductor packaging. The STA-10iL comes standard with in-line conveyance for high-volume manufacturing. An optional drawer can be installed for high-mix, low-volume production.
STW-10
for plasma processing 300 mm wafers and dies on tape frames
Atomflo™-INT
for integration of plasma treatment into other manufacturing tools
The Atomflo™-INT plasma system is configured for integration into new or existing process equipment. External rack-mounted controllers support 1 or 2 plasma heads imbedded inside the primary machine. Communication over Ethernet IP provides complete process control and data logging. The INT complies with all US, EU, and SEMI EH&S standards. This integrated plasma system provides the most advanced surface treatment technology inside your equipment.
Atomflo™ 600 plasma controller and coolant control module
Atmospheric plasma sources
SPS-100
