Accessories and Options

Cabinets

Cabinets are available to house the plasma system and robot. They come equipped with utilities connections and a Sentry air filtration system (see below) to remove ozone generated by the plasma. The robot with teach pendant mounts on the upper deck, while the Atomflo™ controller is conveniently located in the lower cabinet. With the doors closed, the plasma system may be safely operated without any EH&S concerns. The cabinet pictured below has the following dimensions: height, 2.1 m (83 inches); width, 1.0 m (39 inches); and depth, 1.0 m (39 inches).

Surfx® Cabinet System

Surfx® Cabinet System


Robots

Surfx offers a wide variety of 3- and 4-axis robots to automatically sweep the plasma applicator over the work piece. Precise scanning of the surface at a fixed distance and speed is essential for many treatment applications. The 3-axis robot pictured below scans an area 200 mm (X) by 200 mm (Y) over a vertical range of 50 mm (Z). The speed ranges from 5 to 500 mm/s in X and Y, and 2.5 to 250 mm/s in Z, with a resolution of 0.02 mm. Table top systems can scan an area up to 500 by 500 mm2, and gantry robots are available for bigger jobs. A programmable “teach” pendant allows the user to precisely and reproducibly scan complex 3-D objects.

Surfx® System with Robot

Surfx® System with Robot


Air Purifier

Air purifiers are available as a stand alone accessory or mounted in a cabinet. They are equipped with activated carbon to scrub ozone out of the off gases from the plasma process. Stand alone purifiers come with a snorkel that is extendable to 6 feet (see picture below). The snorkel is mounted in close proximity to the plasma source to exhaust the process gas. The draw rate of the purifier is 70 cubic feet per minute.

Snorkel Sentry Air Purifier

Snorkel Sentry Air Purifier

 

 

 

 

 

 

 

 

 

Precursor Delivery System

The A-PD Precursor delivery system precisely meters precursor vapor into the coating process. The A-PD precursor delivery system includes a temperature-controlled bath and gas manifold system with vent/run and dilution mass flow controllers, which provide accurate delivery of precursors to CVD processes.

Please contact us for further information.

A-PD Precursor Delivery System