Electronics

Atomflo™ plasma systems are an effective, low-cost solution for R&D and process development on semiconductors, solar cells, batteries and sensors:

  • Surface activation for direct wafer bonding and thin film adhesion
  • Enhanced wettability for improving liquid flow over wafer surfaces
  • Metal oxide removal for metal-metal bonding
  • Wafer cleaning and organic contamination removal
  • Photoresist etching

Atomflo™ plasma systems provide highly repeatable, single part processing with excellent treatment uniformity.

 

Viz-bond™ Optical Bonding from Optical Filters Ltd

Using our background of over 25 years in display enhancement and other display bonding options Optical Filters has developed Viz-Bond™, a wet bonding system that cures to a gel, to deliver a cost effective, scalable system in which the components are processed at ambient temperature without the use of vacuum, temperature, pressure and need for multiple tooling.

Sunlight readability and environmental performance such as impact, shock, temperature and humidity are delivered at new levels of performance through full optical bonding with the Viz-bond™ system.

Product Demos
Video demonstrating Indium oxide removal
Video demonstrating wafer cleaning

 

Products

Surfx Technologies provides market specific tools for the Semiconductor industry. These include:

SPM9

The Standalone Plasma Machine (SPM) is a turnkey system that integrates the Atomflo 500 solution into a neat, compact, multi-axis production system. The Standalone Plasma Machine features:

  • Advanced graphical motion management software, generating NC code for the motion engine
  • 4-axis motion with 400 x 400 x 300 mm plasma treatment volume
  • Modular control system architecture capable of interfacing to other systems
  • Helium and argon plasmas with oxygen and/or nitrogen secondary gases

The Standalone Plasma Machine’s software provides real-time system monitoring, real-time control, and versatile programming options.

Atomflo 500 web

The new Atomflo™ 500 is an excellent fit for demanding high-throughput production applications that require direct real-time process monitoring feedback. This completely new controller design includes a touch-screen user interface, increased RF power, high-speed RF tuning, and an increased accuracy of the matching network.

The Atomflo 500 provides an enhanced atmospheric plasma facility:

  • Argon or helium as primary gas
  • Tertiary gas capable
  • Improved tuning and matching system
  • 8” touch screen HMI with easy-to-use interface for monitoring, configuration, data logging and recipe management

If you would like more information regarding our systems capabilities or would like to schedule a free demonstration please contact us.