Applications MEMS and MicroFludics

Micro-electromechanical systems (MEMS) and microfluidics require advanced plasma processing during their manufacture. Atomflo™ plasma systems may be used to:
Clean interior surfaces
Remove bio-foulants and organic contamination
Activate surfaces for direct bonding or film adhesion
Enhance wetting to eliminate trapped bubbles
The Atomflo™ is uniquely suited for MEMS because the plasma flows through the device treating all surfaces uniformly. Surfx’s plasma systems are a proven solution for critical MEMS and microfluidics fabrication steps.

Please contact us for further information.