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Applications

• Surface Treatment
• Plasma Deposition
• Surface Cleaning / Sterilization

  WATCH VIDEO

Surfx® Plasma Treatment on Silicon Wafer

(3 MB, WMV format)

  WATCH VIDEO

Surfx® 3-D Plasma Treatment on Connector

(3 MB, WMV format)

Technology Breakthrough

The Atomflo™ and Plasma Flow Systems™ are a technology breakthrough! They provide a powerful plasma for materials processing at atmospheric pressure and near room temperature. These products are well suited for many applications, particularly for the surface treatment of thermally sensitive materials such as polymers and composites.

The advantages of Surfx's atmospheric plasma sources are:

  • High density of reactive species at low temperature.
  • Ions and electrons confined to the source,
    avoiding substrate damage.
  • Fast, uniform treatment of large areas.
  • Operates with wide range of gas chemistries.
  • Easily integrated into other process equipment.
  • Extremely reliable.
  • Safe and easy to use.

Our atmospheric plasma is a low temperature source of atoms and radicals. These reactive species are delivered to the sample to clean, remove, modify, or deposit a material of your choice. The Atomflo™ is the only atmospheric plasma on the market that offers a broad range of surface chemistries. An inert gas, helium or argon, is fed to the source along with a few percent of gas molecules, such as oxygen, hydrogen, nitrogen, or carbon tetrafluoride, thereby generating O, H, N or F atoms to plasma treat the surface.

The Atomflo™ provides all the power of plasma chemistry with none of the hassle of vacuum operation. Moreover, there is no risk of electrical shock from the source. In the sections below, we describe some of the valuable uses of our exciting product.

Click here to request a free copy of our Application Notes. These notes describe the principles of operation of different atmospheric plasmas, including coronas, dielectric barrier discharges, plasma torches, and the Atomflo™ RF plasma. In addition, they describe the use of atmospheric plasma for surface treatment, including plasma cleaning, plasma coating, etching, and surface activation for adhesion.

To see the Atomflo™ atmospheric plasma system in action, visit our multimedia page.

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Surface Treatment

The chemical species generated by the plasma quickly modify the surface of polymers, composites and other materials. Oxygen plasmas are especially effective for improving adhesion. This effect is evident upon checking the wettability after a short exposure to the Atomflo™ atmospheric plasma. Beforehand, water droplets bead up on the plastic surface, whereas after exposure, the droplets spread out flat. We have measured the surface energy of many plastics after plasma treating them, including polyethylene (LDPE and HDPE), polystyrene, polycarbonate, polypropylene, polyetheretherketone, nylon and silicone rubber. After a 1/4 second treatment, the average surface energy increased by more than 25 dynes/cm. If you have a bonding problem, the Atomflo™ is very likely the most cost effective solution you can find.

Atomflo™-500R scanning over plastic parts for surface treatment (Patents Pending)
Atomflo™ AH-500L scanning over plastic parts
for surface treatment (Patents Pending)

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Plasma Deposition

Plasma-enhanced chemical vapor deposition (PECVD) is widely used to coat thin films onto other materials. These films serve many purposes. Silicon dioxide and silicon nitride layers are essential components of integrated circuits. Diamond-like coatings increase the wear and corrosion resistance of metal parts. Nanocoatings of glass on plastic sheet prevent oxygen and moisture penetration, and improve packaging. Thicker glass coatings may be used for scratch protection on structural plastics.

Our plasma sources are configured for PECVD by integrating a proprietary precursor distributor into the applicator. In addition, a delivery system is provided for the controlled introduction of the precursor to the gas stream. Many different chemicals are available, depending on the material you wish to deposit. For example, hexamethyldisilazane may be combined with an oxygen plasma to generate glass coatings, or with a nitrogen plasma to produce silicon nitride. The beauty of our product is that you can coat 3D objects of any size or shape.

Plasma coating is a domain of excellence for Surfx® Technologies. We have developed many novel processes and will support new applications as needed for our customers.

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Surface Cleaning / Sterilization

The Atomflo™ oxygen plasma produces a stream of O atoms that quickly strips organic films from surfaces. The reaction byproducts are carbon dioxide and water. The organic films can be etched away at rates approaching several microns per second, and with exceptional uniformity across the surface!

Atmospheric plasma cleaning may be combined with water rinsing to achieve critical cleans that do not generate hazardous waste disposal problems.

Viruses and bacteria are organic materials, and are quickly destroyed on contact with an oxygen plasma. Thus, our products may be used for sterilization and decontamination.

Removal of buffer from fiber optics
Removal of buffer from fiber optics

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